Ball screw driven precision swivel stage
With ball screw drive, durability has significantly improved! A suitable □100mm size for high-precision tilt alignment has arrived!
The "Ball Screw Driven Swivel Stage" is a product that allows for control with higher resolution. The weight has been reduced from 2.8 kg to 2.0 kg, a decrease of 28%, and durability has been significantly improved with ball screw drive. It is suitable for wafer alignment and creates free space above and below the workpiece, increasing design flexibility. 【Features】 ■ Allows for control with higher resolution ■ Weight reduced by 28%, from 2.8 kg to 2.0 kg ■ Durability significantly improved with ball screw drive *For more details, please refer to the PDF document or feel free to contact us.
- Company：神津精機
- Price：Other
